Determination of Anisotropic Crystal Optical Properties Using Mueller Matrix Spectroscopic Ellipsometry
نویسندگان
چکیده
منابع مشابه
Application of spectroscopic ellipsometry and Mueller ellipsometry to optical characterization.
This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced tec...
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We characterized two samples consisting of photoresist layers on silicon with square arrays of square holes by spectroscopic ellipsometry (SE) and Mueller matrix polarimetry (MMP). Hole lateral dimensions and depths were determined by fitting either SE data taken in conventional planar geometry or MMP data in general conical diffraction configurations. A method for objective determination of th...
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ژورنال
عنوان ژورنال: Procedia Materials Science
سال: 2016
ISSN: 2211-8128
DOI: 10.1016/j.mspro.2016.03.021